UHV Components

1-2 axes MBE Manipulators

Drive-m, our control unit, is about the size of a shoebox and offers a complete functional MRI scanner for educational NMR and MRI experiments.

Created with state of the art electronics, the control unit contains a built-in gradient and RF amplifiers.

The 1-2 axes motorised MBE manipulator is a high rigidity UHV specimen manipulator of modular construction, suitable for a range of R1 motorised continuous substrate rotation and Z translation.

It is prepared to heat the substrate up to 1400°C (EB heating, UHV conditions) with accuracy +/- 1°C. The station includes the substrate (standard up to 6 inch sample holder) positioner and allows precise angular position of substrate in relation to linear shutter.

Applications

The 1-2 axes motorised MBE manipulator is designed for MBE applications under ultra-high vacuum conditions. Heating is performed by resistive or EB methods. The manipulator can work in the vertical orientation.

Manipulator for MBE applications:

▪ sample holders: generally plate style
▪ prepared for reaching high temperature
▪ base pressure: 10-11 mbar

Option

▪ H2O shroud
▪ LN2 or H2O cooling
▪ side or integrated wedge shutter (possible with H2O cooling option)
▪ XY movement stage
▪ shutter on/off

Technical data

* stepper motor or servomotor - depend on application.
Manipulator can be prepared for customer motors or drivers - on request.

1-4 axes Sputtering Manipulators

Modular, motorised manipulator suitable for a range of R1 continuous substrate rotation and Z translation (additionaly can be equipped with XY movement module).

It is prepared to heat the substrate up to 1000°C with accuracy +/- 1°C. The station includes the substrate (standard up to 6 inch sample holder) positioner and allows precise angular position of substrate in relation to linear shutter.

Applications

The 1-4 axes motorised sputtering manipulator is designed for sputter deposition applications under ultra-high vacuum conditions, and for reactive sputtering. Heating is performed by resistive method. The manipulator can work in the vertical orientation.

Manipulator for sputtering applications:

▪ sample holders: plate style, PTS
▪ base pressure: 10-9 mbar (working pressure: ~10-2 mbar)

Heater materials

The heater material is optimally adapted depending on the customer's requirements and the specific conditions of the deposition process (e.g. heating temperature, presence of reactive gases). Exemplary heaters: thermocoax, graphite coated with SiC, SiC solid (β).

Option

▪ H2O cooling
▪ side or integrated wedge shutter
▪ XY movement stage
▪ BIAS, DC ,RF

Technical data

* stepper motor or servomotor - depend on application.
Manipulator can be prepared for customer motors or drivers - on request.

1-4 axes PLD Target Manipulators

The 1-4 axes motorised PLD target manipulator is a high precision revolver mechanism with capacity up to 6 target holders.

The target manipulator has two axes of rotation - R1 and R2: by changing the position of R1, different targets are selected. The R2 axis has a continuous rotation around its own axis. The manipulator has additional hole/position (between two targets) to accommodate a laser power meter. The XY motion module allows scanning of the target via laser beam. One axis is motorised - for scanning, second is manual - for adjusting. Additional Z axis is used to set up transfer position for target transferring via Load Lock Chamber. The Z movement can be motorised or manual. Computer controls the target rotation and radial scanning over the complete target diameter (fixed laser beam) for making multi-layer deposition with maximum target usage.

Applications

The 1-4 axes motorised PLD target manipulator is designed for pulsed laser deposition applications under ultra-high vacuum conditions. The manipulator can work in vertical or horizontal orientation, depends on PLD process geometry.

Manipulator for PLD applications:

▪ two manipulators: for substrate and target
▪ substrate holders: plate style, PTS, flag style
▪ base pressure: 10-10 mbar

Additional information

▪ possibility of fixing targets with irregular shapes,
▪ target sizes: 1 ", 2", standard target thickness: 0.5 - 10 mm,
▪ continuous, individual rotation of targets,
▪ select and sequence change of targets,
▪ shield against mutual pollution of targets,
▪ radial scan, automatic control,
▪ target is mounted coaxially (relative to the substrate) and positioned so as to eliminate the likelihood of droplets, clusters settling on the substrate and the effects of possible target peeling,
▪ target holders are transferable to the load-lock chamber (or storage) for quick replacement,
▪ water cooling system.

Technical data

* stepper motor or servomotor - depend on application.
Manipulator can be prepared for customer motors or drivers - on request.

High Pressure Cell Manipulators

Specially designed 3-axes high pressure cell manipulator with IR laser heating possibility (double Z axes: one for gas cell proper placement and second for high precise sample positioning).

For easy disconnection from the gas cell chamber, the manipulator is mounted on the rails. HP cell manipulator design allows for sample heating by IR laser illumination (the sample temperature over 800 °C is reachable within the cell), resistive heating (up to 700 °C) and LN2 cooling.

Goniometers

High rigid, 2-axes precise goniometric stage is designed specifically for detectors.

Both axes are fitted with vernier readouts of 0.1° precision and provides full 360° R1 rotation in the horizontal plane (with no sources hindering the movement) and up to 90° R3 tilt from vertically upward pointing to horizontal. Stepper motor controller with external panel and computer interface.

The goniometer’s head permits precision sample positioning and alignment motion at the sample location. Installation of a goniometer head enables rotations, translations and flip movements with various accuracies. Sample faces can be held on axis, allowing a single sample site to be investigated during a change of angle.

The goniometer is fabricated entirely from UHV compatible materials, has anti-backlash spring-loaded gearing, and can also be fitted with heating, cooling and sample transfer options.

Multi-axes Special Design Manipulators

The multi-axes (X,Y,Z1,Z2,R1,R2,R3) motorised manipulator is designed for precision positioning of sample holders under ultra high vacuum conditions.

Reasearch table can travel along the XYZ axes, rotate around Z axis, as well as tilt in relation to two orthogonal directions in the +/- 3° range. The second Z movement is possible for additional precise sample positioning while experiment. It is equipped with temperature monitoring system. These manipulators are configured with an inclinometer as standard.

Slit Unit Manipulators

Horizontal and vertical shutters, positioned inside the vacuum chamber, are translated via a single axis manipulator in order to adjust the shape of cross-sectional area of the beam.

All manipulators are motorised and software controlled.  Shutters are available with or without water cooling. Surfaces can be coated with a fluorescent material. Different material and shapes available according to requirements.

Technical data

Mirror/Gratings System Manipulators

Multi-axis manipulator in order to determine the correct direction of the beam.

Vacuum mirror chambers are situated along the synchrotron beam line. Mirrors are located inside the chamber and mounted on a vibration isolated special holder which is moved using a multi-axis manipulator in order to determine the correct direction of the beam.

VERTICAL WEDGE STAGE

Very rigid, motorised vertical axis stage for e.g. positioning the grating chamber. 
Z stroke: ± 10 mm
Resolution: 5 μm

Technical data

XY Stages

The XY stage is a precision, high rigidity UHV specimen translator having X and Y motions.

The standard mounting flange is DN 160CF. A DN 100CF mounting flange version is also available. The stage can work in any orientation.

Application

The XY stages has been designed for ease and convenience of use. X and Y movement are ± 25.0 mm, depending on the accessories that are fitted. They can also be used to reposition a chamber port with an axis that is parallel to, but slightly off, the desired direction. In this last usage it is sometimes referred to as an XY adjuster and is a very economical alternative to other devices.

Technical data

MAXIMUM XY RANGES

XY Stage DN 160/100CF ranges (example)

Z Slides

The Z slide is a precise, high rigidity UHV specimen translator having Z motion.

The travelling flange can be chosen depending on the type of accessories. The translator is suitable for vertical or horizontal mounting.

Application

The Z slides have been designed for ease and convenience of use. Z movement is 75 - 800 mm, depending on application. These translators provide greater linear travel than is available from the linear shifts.

Additional information

The Z slides are mostly used together with XY stages. After combining the Z slide with an XY stage we get the XYZ stage with three degrees of freedom. The Z slide can also be fitted with a stepper motor as required.

Technical data

COMPRESSED / EXTENDED LENGTH

R2/R3 Tilt Modules (combined with XY Stages)

The R2/R3 tilt module provides short inclination in relation to one of the orthogonal directions (X or Y axis) in the ± 3° range.

Integration with XY stage (through a common bellows) is recommended for best motion range. Module geometry is customized in order to maintain the radius of rotation around the focus point and other customer requirements. The R2/R3 rotation can be motorised or manual.

Application

The R2/R3 tilt module has been designed to achieve the best angular resolution, thanks to a large radius of rotation.
In addition the rigid design allows attachment of heavy loads to the end-effector. Another advantage of this solution is the lack of mechanical parts on the vacuum side. The functionality can be extended by changing the arrangement of chosen modules (R2 tilt, R3 tilt, R1 rotation, XY stage, Z slide).

Technical data

Differentially Pumped Rotary Feedthroughs

The differentially pumped rotary feedthrough provides 360° of continuous rotary freedom through the vacuum wall of a UHV system.

The feedthrough has two stages of differential pumping isolated by graphite-impregnated, expanded viton seals on special sealing surfaces. A pre-loaded ball bearing set accurately controls the rotating stage position.

Application

The differentially pumped rotary feedthrough can be combined with manipulators and any other precision positioning devices.

Additional information

The feedthroughs are equipped with worm drive providing fine angle adjustment. They are available with an anti-backlash stepper motor.
Different motors or motor control systems available (stepper motors, servomotors, IcePAP).

Technical data

DIAMETER & DISTANCE BETWEEN FLANGES

Linear Shifts

The linear shift is a UHV transfer mechanism that is fabricated from a pair of flanges, connected by an edge welded bellows.

The free flange moves towards the fixed flange in a controlled, precise motion whilst maintaining parallelism. Its action is similar to the Z slide manipulator, but with slightly reduced travel length and overall positioning resolution. The standard mounting flange is DN 40CF or DN 63CF. The shift is actuated by a handwheel and can work in any orientation.

Application

The linear shifts are used in applications that don’t require the higher precision and graduated movement of other linear motion devices. They are normally used for:
· manipulation of surface science tools with respect to the sample position
· manipulation of evaporation and sputter sources
· manipulation of electron and x-ray sources
· manipulation of quartz oscillators
· sample transfer applications

Additional information

The linear shifts are designed for the linear movement of instruments with minimum tilt or wobble in the movement, maintaining precision alignment before and after pump-down.

Technical data

COMPRESSED / EXTENDED LENGTH

Z Chain Slides

The Z chain slide provides short strokes of Z travel with a wide range of bellows I.D.

The slide is provided through three lead screws which are synchronously driven by a drive chain. Manual operation is provided by a handwheel assembly operating through a wormdrive reduction system.

Application

The Z chain slides are heavy duty translators designed to move heavy objects accurately in and out of the vacuum system. They are well suited to applications involving equipment insertion and withdrawal from points where space is restricted.

Additional information

Z chain slides are often integrated with an XY stage. The unit is intended primarily for vertical operation with the load supported on the Z axis. For alternative orientations please contact our technical department. The Z chain slide can be motorised with the stepper motor shift.

Technical data

COMPRESSED / EXTENDED LENGTH

Wobble Sticks with Cleaver

The Wobble Stick with Cleaver is a 3-axis manipulator dedicated to cut the sample in UHV chambers.

It has interchangeable knives, fixed with four screws M3 and pressed using plates.

Technical data

Wobble Sticks with Rotating Tip

The Wobble Stick with Rotating Tip is used mainly to operate in vacuum mechanisms such as shutters, adjustment probes and variable orifices.

Non magnetic vacuum parts.

Technical data

Wobble Sticks with Gripping Arms

The Wobble Stick with Gripping Arms is generally used to grip and lift samples (15x10x1 mm) with a flat surface. 

Custom shaft length and Z travel ranges are available on request.

Technical data

4-6 axes Helium Manipulators (Open Cycle)

The manipulator is a high precision, high rigidity, UHV specimen manipulator of modular construction, suitable for a range of X, Y and Z linear motions and R1, R2 and R3 rotations.

The modular construction means that the specification can be upgraded or modified by the addition to replacement of well defined modules.

Option

▪ Full motorisation
▪ Full software control
▪ Helium recovery system
▪ Possibility to mount an angular device for PES calibration
▪ Temperature stabilisation
▪ Heating option: direct, resistive or EB

Heating and cooling methods

Sample temperature depend on sample holder type:
▪ Direct heating with 10 A
▪ Resistive heating up to 1100 °C
▪ EB heating up to 1400 °C
▪ Liquid helium cooling:
  - 4 axes manipulator - down to 4 K*
  - 5 axes manipulator - down to 4.8 K* / 10 K**
  - 6 axes manipulator - down to 7 K* / 15 K**
* parameters achieved without heating option and temp. stabilisation.
** parameters achieved with heating option.

Technical data

* stepper motor or servomotor - depend on application.
Manipulator can be prepared for customer motors or drivers - on request.

4-6 axes Helium Manipulators (closed Cycle)

The manipulator with helium cryostat is a versatile, closed cycle system that has many applications in ultra high vacuum research.

The manipulator can be configured with Z slide, XY stage or differentially pumped rotary feedthrough. The modular construction means that the specification can be upgraded or modified by the addition or replacement of well defined modules. The standard mounting flange is DN 100CF. The system typically includes a compressor, high pressure hoses, expander, temperature controller, heater and sensor.

Option

▪ Full motorisation
▪ Full software control
▪ Helium recovery system
▪ Possibility to mount an angular device for PES calibration
▪ Additional electrical contacts for silicon sample direct heating
▪ Low vibration cryostat
▪ Temperature stabilisation
▪ Heating option: direct, resistive or EB

Heating and cooling methods

Sample temperature depend on sample holder type:
▪ EB heating - up to 1000 °C (second stage)
▪ Direct heating with 10 A
▪ Resistive heating (on request)
▪ Liquid helium cooling:
  - below 10 K* (5-axes manipulator)
* parameters achieved without stabilisation and without heating option.

Technical data

* for base flange DN 160CF
** stepper motor or servomotor - depend on application.
Manipulator can be prepared for customer motors or drivers - on request.

4-5 axes Universal manipulators

The 4-5* axes manipulator with X, Y, Z, R1, R2 axes motorised is a high precision, high rigidity, UHV specimen manipulator of modular construction.

The modular construction means that the specification can be upgraded or modified by the addition or replacement of well defined modules. All axes of the manipulator are motorised by stepper motors or servomotors. The X, Y and Z axes may also be operated manually by as required. The standard mounting flange is DN 100CF or DN 160CF. The 4-5 axes manipulator is a combination of XY stage, Z slide and rotation stages.

Option

▪ Full motorisation
▪ Full software control
▪ Temperature stabilisation
▪ Heating option: direct, resistive or EB
▪ Heaters suitable for reactive gases (resistive heating)

Additional infromation

The multi-axes manipulators are configured with a sample receiving station that can accept one of the PTS range of sample holders. The station is equipped with 6 electrical contacts (2 x thermocouple type K, C or E; 2 x sample bias up to 1000V, 2 x heating current up to 20A) and sapphire ball cooling contact for liquid nitrogen cooling. The manipulator includes all of the necessary electrical, gas and mechanical feedthroughs together with stepper motor and stepper motor driver for the XY, Z, R1 and R2 axes.

* 6 axes manipulator for PTS sample holders on request.

Technical data

* stepper motor or servomotor - depend on application.
Manipulator can be prepared for customer motors or drivers - on request.

1-3 axes manipulators

According to the precise individual needs of the client, we can design and provide a wide range of customised UHV manipulators.

The manipulators can move sample in any of three orthogonal axes XYZ. Additional rotational movements around these axes (R1, R2, R3) can be achieved using add-on rotary devices. To achieve the highest positioning accuracy, resolution and repeatability, the XYZ manipulator and rotary drive movements can be motorised. Manipulators can work in any orientation.

Heating and cooling option

PTS and flag style range of sample holders dock with the receiving station on each manipulator. Samples are either resistively or electron-beam or direct current heated, depending upon the requirement. They are cooled by using a manipulator mounted cryostat through which liquid nitrogen (LN2) or liquid helium (LHe) flows.

0-axis stages

The 0-axis stage is the most appropriate and economical choice when sample heating and cooling is required without any form of manipulation/rotation etc.

It has additional uses such as e.g. a temporary storage or static preparation table when combined with a wobble stick.

Heating and cooling option

PTS and flag style range of sample holders dock with the receiving station on each manipulator. Samples are either resistively or electron-beam or direct current heated, depending upon the requirement. They are cooled by using a manipulator mounted cryostat through which liquid nitrogen (LN2) or liquid helium (LHe) flows.

XYZ Mini manipulators

The XYZ mini manipulator is a high precision UHV specimen translator having X, Y and Z motions.

The standard mounting flange is DN 63CF and the standard travelling flange is DN 40CF. All three axes are merged in one miniature stage that delivers outstanding performance at exceptionally low prices. The translators can work in any orientation.

Application

The XYZ mini manipulator has been designed for ease and convenience of use. X and Y movement is ± 12.5 mm, depending on the accessories that are fitted. Z movement is 75-250 mm, depending on the application.

Additional information

Only the Z movement can be motorised.

Technical data

Compressed / Extended Length