This multifunctional system is designed for precise and varied analysis of material surfaces.
The system consists of a main frame of fixed vacuum chambers; analysis chamber, preparation chamber, load lock chamber and linear transfers. All frames are independent and supplied on castors with screw locking sets for floor positioning. The frames can be disconnected and moved to other positions within the laboratory as necessary. Each frame is also equipped with its own bakeout tent. The system is extremely versatile and can be further extend in the future to add e.g. cleaver chamber, storage chamber and/or PLD chamber.
The system has an independent free-standing controller cabinet for both vacuum and instrumentation devices.
The UHV system comprises various interlocked turbo-molecular pumping sets, ion pumps and titanium sublimation pumps. The pumping systems, gauges and valves (safety and vent), are fully microprocessor and software controlled with full safety interlocks.
The various chambers are internally illuminated with fiber optics outlets for surveillance of the sample transfer/holder mechanisms between chambers.
The system is equipped with a distilled water chiller.
Various sample holders are supplied to provide a wide range of heating and cooling capabilities.
Analytical chamber designed for X-ray photoelectron spectroscopy (XPS), integrated with multichamber vacuum system for thin film deposition.
The UHV ESCA system dedicated for investigation of the chemical and physical properties of solid state surfaces in wide temperature and pressure ranges.
Multichamber UHV system dedicated to surface analysis of solid and powder samples by electron spectroscopy techniques:
Sample loading, transferring and storage system, Equipment for sample preparing and cleaning. UHV Flow Through High Pressure Reactor. Gas dosing system, pressure and temperature measurement and control system, vacuum controlling system. Sample temperature measurement and control system. Sample loading, prepare for UHV suitcase using, Unique Radial Distribution Chamber system with extremely easy handling solution. Storage chamber with heating and cooling possibilities. High pressure reactor for thermal / pressure processes in range up to 20 bar and 650°C. Solution with extremely short time heating in high pressure and UHV.
Customized multi chamber UHV system dedicated for investigation of the chemical and physical properties of solid state surfaces in wide temperature and pressure ranges.
Multi-chamber system designed for investigations and modifications of solid surfaces by different methods under very well controlled conditions. Central radial distribution chamber with attached analytical chambers and auxiliary chambers fulfill these demands and ensure high quality measurement because the samples are transferred between chambers under UHV pressures (<10-10mbar). The base pressure in the analytical chambers is < 5*10-11 mbar.
Customized multi chamber UHV system dedicated for investigation of the chemical and physical properties of solid state surfaces in wide temperature and pressure ranges.
A analytical UHV system HV system dedicated for investigation of the chemical and physical properties of solid state surfaces in wide temperatures and UHV conditions.
A analytical UHV system dedicated for investigation of the chemical and physical properties of solid state surfaces in low temperatures and UHV conditions.
Mini PTS Sample holder.
- Analysis chamber with base pressure range 5*10-11 mbar include:
- Load Lock chamber allows loading up to 5 miniPTS sample holder
- Two-level Preparation chamber equipped with:
- Storage Chamber including park mechanism for six miniPTS sample holders
- Radial distribution chamber (UFO) for transferring the samples are transferred between chambers under UHV pressures
- Accessories:
It is quipped with a HP analyser but the focus is on a highly flexible sample environment, partly in form of a newly developed, highly versatile, gas cell, partly in form of the possibility of replacing the analysis chamber with a completely different chamber setup. The station will thus allow for frontier research on gas-solid and gas-liquid interactions. The system is equipped with automated control features to allow for safe and efficient operation of many different types of samples by many different operators.
The heart of the system is the analysis module that is based on the high pressure analyser and a gas cell concept designed by PREVAC.
HP cell 3-axes manipulator design allows for sample heating by IR laser illumination (the sample temperature over 800 °C is reachable within the cell), resistive heating (up to 700 °C) and LN2 cooling (with double Z axes: one for gas cell proper placement and second for high precise sample positioning). For easy disconnection from the gas cell chamber, the manipulator is mounted on the rails.
▪ Ambient pressure 50 mbar - 10-10 mbar
▪ Highly flexible sample environment
▪ Innovative, versatile gas cell
▪ Easy HP cell manipulator dissasembly
▪ Easy analyser module dissasembly
▪ Easy operation
▪ For gas-solid and gas-liquid interactions
▪ Ambient pressure 50 mbar - 10-10 mbar
▪ Highly flexible sample environment
▪ Innovative, versatile gas cell
▪ Easy HP cell manipulator dissasembly
▪ Easy analyser module dissasembly
▪ Easy operation
▪ For gas-solid and gas-liquid interactions
Multitechnique IR-UHV system offering a wide range of surface characterisation techniques, including:
The setup is optimized for Infrared (IR)-spectroscopy, it is the first UHV-system on the market allowing to record data using IR reflection-absorption spectroscopy (IRRAS) on dielectric substrates (oxides, nitrides) in a routine fashion.
A flexible sample holder with integrated heating allows for the application of a variety of sample preparation procedures. A sample transfer system and two radial distribution chambers offer a maximum of flexibility.