UHV Electronics
1.Magnetron Power Supply M600DC-PS
ATC ORION SERIES SPUTTERING SYSTEMS
The M600DC-PS is compact switch-mode power supply designed to drive magnetron sources.
All adjustable parameters are displayed on the large TFT display with touchscreen. All settings can be manually adjusted or can be stored and recalled automatically after unit switch on. The unit also features a built in timer and automatic standby mode. It is fully interlocked for both, user and device safety. Unit can be remotely controlled via one of available analog or digital interfaces.
Features
• Easy to extend power up to 1200 W/1800 W/2400 W with additional modules
• Switch mode for 3 magnetron sources with shutters control
• Adjustable limits of voltage, current and power separately for each output
• Multiple I/O - individual programmable
• Arc detection system
• 2D real time chart module
Support for:
• Thickness and evaporation rate measurements
• Vacuum measurements
• Mass Flow Controller
Technical data
| Supply voltage | 100 - 240 V, 50/60 Hz |
| Output voltage | up to 1200 V (from 50 V) |
| Output current | up to 1200 mA* (from 1 mA) |
| Output power | up to 600 W** (from 1 W) |
| Switch mode | 3 outputs for magnetrons |
| Analog inputs/outputs | 3 (0-10V)/3 (0-10V) |
| Digital inputs and outputs | individual programmable |
| Timer | dual mode timer 0 s - 99 h 59 m |
| Thickness and evaporation rate measurements | 1 channel for Thickness Monitors TM13/TM14 |
| Vacuum measurement | 1 channel for active vacuum gaguges: CTR90, TTR90, TTR91, TTR211, PTR225, PTR90, ITR90, ITR100, Baratron, ANALOG IN, MKS937A, PG105, MG13/14, PKR251/360/361, PCR280, ATMION |
| Mass Flow Controller | 1 channel for MKS KF1 |
| Communication interface | RS232/485, Ethernet |
| Communication protocol | MODBUS-TCP/RTU |
| User Interface | 5” TFT display with touchscreen, digital encoder |
| Interface languages | English, German, Polish |
| Dimensions | 242 x 87 x 450 mm (W x H x D), 2U 42HP |
| Weight (approx.) | 6 kg |
* easy to extend with additional modules, up to: 2,4 A/3,6 A/4,8 A
** easy to extend with additional modules, up to: 1200 W/1800 W/2400 W
2.Sample Heating Power Supply HEAT3-PS
The HEAT3-PS is used for resistive heating or electron bombardment heating.
The power supply can also be used for effusion cell evaporators. The unit is equipped with a PID temperature controller.
Ramp heating function control sample temperature to protect sample from damage. Sample overheating can also be protected by setting the voltage and current limits. The unit can be operated in auto mode (with temperature control) or manual mode (without temperature control).
Features
• dual heating mode: resistive and electron bombardment
• wide range temperature measurement (1.4-2473.15K)
• 2D real time chart module
• Shutter Control - up to 2 shutters for double DC module version, 1 shutter per channel (eg. shutters of sources or manipulators)
• high efficiency
• setpoint based over-voltage and over-current output protection
• fully manual or PID temperature controlled (by setpoint and ramp)
• process temperature control with built-in PID controller (with autotuning function for optimized process PID parameters)
• various kind of temperature sensors: thermocouples K/C/E/N (other on request), Pt, diode
• multiple I/O (10 digital/4 analog) - individual reprogrammable
• high resolution (16-bit analog I/O, 0.1 K temp.)
• one vacuum channel for active gauges
• mobile solutions for remote access and control
• customised menu options (for robust and effectivity)
• support (easy firmware update via USB)
• autosave function
Applications
• any thermal process according to the specifications
• effusion cells supply
• sample holders heatings
• thermal monitoring
Options
• second DC module available:
- two resisting heating zones with independent control, or
- one resistive heating zone with higher output power (90V, 17A or 45V, 30A)
• software control (Version Pro, Extended or Library Module)
• analog I/O card for vacuum measurement (1 gauge)
Technical data
| Supply voltage | 100-130 VAC/200-260 VAC, 50-60 Hz (power consumption max 1600 W) |
| Resistance heating mode parameters | 45 V, 17 A - standard; other versions on request |
| Electron bombardment mode parameters | 1000 V, 300 mA - standard, other versions on request |
| Temperature range | 273.15 K-2473.15 K for type C thermocouple 73.15 K-1645.15 K for type K thermocouple |
| Temperature independent input | 2 - for thermocouples K/C/E/N 2 - for silicon diodes DT670/DT470 |
| Temperature setpoint ramp rate | adjustable from 0.1° to 1000°/ s/min/h |
| ΔT setpoint | 0.1 to 5.0°/s |
| Vacuum measurement (optional) | CTR90, TTR91, TTR211, PTR225, PTR90, ITR90, ITR100, Baratron, ANALOG IN, MKS937A, PG105, MG13/14, PKR251/360/361, PCR280, ATMION |
| Communication interface | RS232/485, Ethernet |
| Communication protocol | MODBUS-TCP |
| User interface | 7″ TFT display with touchscreen, digital encoder |
| Interface languages | English, German, Polish |
| Dimensions [mm] | 448.8 x 132.5 x 375 mm (W x H x D), 19" rack mountable |
| Weight (approx.) | 8.8 kg (for standard version) |
3.Ion Source Power Supply IS40-PS
High stability & low noise power supply, which can be configured to work with IS 40C1 or IS 40E1 Ion Sources.
Ion Source IS 40E1 mode
The IS40-PS power supply drives the IS40E1 Scanning Ion Source. It allows fine adjustment of the primary beam energy, ion density and beam profile (by adjustment of extractor, focus lenses, deflection and positioning elements). Up to 4 parameters can be varied via the digital encoder. The current status of each parameter is displayed on the large front panel LCD display. All settings can be manually adjusted or can be stored and recalled automatically after unit switch on. The unit also features a built in timer and automatic standby mode. Easy firmware update via USB port. Unit can be remotely controlled via RS232/485 or Ethernet interfaces. Autosave function for saving your parameters/unit preset and applying them automatically after restart.
Wien filter option available.
Ion Source IS 40C1 mode
The IS40-PS power supply drives the IS40C1 Ion Source which is used for broad area UHV sample cleaning and preparation. The IS40-PS power supply allows fine adjustment of both beam energy and ion density via digital encoders. All settings can be manually adjusted or can be stored and recalled automatically after unit switch on. The unit also features a built in timer and automatic standby mode. Easy firmware update via USB port. Unit can be remotely controlled via RS232/485 or Ethernet interfaces. Autosave function for saving your parameters/unit preset and applying them automatically after restart.
Options
- Software control (Version Pro, Extended or Library module)
- Analog I/O card for vacuum measurement (1 gauge)
Technical data
| Supply voltage | 100V - 240V, 50-60Hz (power consumption max 250W) |
| Timer | dual mode timer, 0 s - 99 h 59 min |
| Vacuum measurement (optional) | CTR90, TTR91, TTR211, PTR225, PTR90, ITR90, ITR100, Baratron, ANALOG IN, MKS937A, PG105, MG13/14, PKR251/360/361, PCR280, ATMION |
| User Interface | 7" TFT display with touchscreen, digital encoder |
| Communication interface | RS232/485, Ethernet |
| Communication protocol | MODBUS-TCP |
| Interface languages | English, German, Polish |
| Dimensions [mm] | 483 x 133 x 437 mm (W x H x D), 19" rack mountable |
Specification (IS40E1 mode)
| Beam energy (E) | 0 - 5 keV, resolution 0.01 keV, ripple < 0.2 Vpp |
| Emission current (Ie) | 0.01 mA - 10 mA, resolution 0.01 mA |
| Focus (1,2) voltage | 0 - 5000 V, resolution 1 V, ripple < 0.2 Vpp |
| Extractor voltage (Ex) | 60 - 100% of energy, resolution 0.1%, ripple < 0.2 Vpp |
| Beam position (Px, Py) | -5 mm to 5 mm, resolution 0.01 mm |
| Scanning area (Δx, Δy) | 10 mm x 10 mm, resolution 0.01 mm |
| Scanning speed (time/dot) | 20 μs - 30 ms |
| Weight (approx.) | 12 kg |
Specification (IS40C1 mode)
| Beam energy (Ueng) | 0.00 keV - 5.00 keV, resolution 0.01 keV, ripple < 200 mV |
| Emission current (Ie) | 0.01 mA – 10 mA, resolution 0.01 mA |
| Weight (approx.) | 9.2 kg |
4.Wien Filter Power Supply IS40-WPS
For accurate depth profiling analysis the ion beam of an electron impact or plasma ion source must be of high purity and free from neutral particles. This is ensured by the Wien Mass Filter which eliminates ions of unwanted isotopes and impurities as well as multiply charged ions and neutral particles. The Wien Mass Filter is arranged between the ionizer volume and the focussing stages of the ion source IS40E1. It selects defined ions and suppresses impurities and neutrals by a combination of electric and magnetic fields.
The Wien Mass Filter has the ability to eliminate:
- ions of unwanted isotopes,
- ions of impurities,
- multiple charged ions,
- charged clusters,
- neutral particles and clusters by inclination of the optical axis.
Technical data
| High voltage power supply output current limit | -/+ 20 mA DC |
| High voltage power supply output voltage | -/+670 V DC |
| Communication | RS232 |
| Mains Power | 100-120 VAC/200-240 VAC, 50-60Hz |
| Net weight | 5.4 kg |
| Dimensions [mm] | 448.8 x 88.1 x 437 (W x H x D) |
5.Electron Source Power Supply ES40-PS
The ES40-PS power supply allows fine adjustment of electron beam energy, density, position on the sample and also beam profile.
Scanning features allows for independently controlled scanning speed and range. All settings can be manually adjusted or can be stored and recalled automatically after unit switch on. The unit also features a built in timer and automatic standby mode. The ES40-PS can be supplied as a full width 19″ rack mounting unit (3U height) or free standing. Easy firmware update via USB port. Unit can be remotely controlled via RS232/485 or Ethernet interfaces. Autosave function for saving your parameters/unit preset and applying them automatically after restart.
Application
The ES40-PS power supply is intended to use with the ES40C1 Low Energy Electron Source or Double Pass Mini Cylindrical Mirror Analyzer CMA 40CF. The power supply allows fine adjustment of the electron beam profile to achieve a small spot at high energy and emission currents.
Options
- Software control (Version Pro, Extended or Library Module),
- Analog I/O card for vacuum measurement (1 gauge).
Technical data
| Supply voltage | 100 - 120 VAC/200 - 240 VAC, 50-60 Hz (power consumption max 250 W) |
| Beam energy | 0 - 5000 eV, resolution 0.1 eV, ripple < 200 mV |
| Emission current | 0.1 - 300 μA, res. 0.01 μA [ES mode] 1 - 3000 nA, res. 1 nA [CMA mode] |
| Focus Voltage | 60 - 100 % related to energy voltage, resolution 0.1 % |
| Wehnelt voltage | 0 - 150 V, res. 0.1 V [ES mode] -12 - 12 V, res. 0.1 V [CMA mode] |
| Beam position (Px,Py) | resolution 0.01 mm, middle pos ±5 mm |
| Scanning area (Δx, Δy) | 10 mm × 10 mm, resolution 0.01 mm |
| Scanning speed (time/dot) | 20 μs - 30 ms |
| Timer | dual mode timer 0s - 99h 59m |
| Vacuum measurement (optional) | CTR90, TTR91, TTR211, PTR225, PTR90, ITR90, ITR100, Baratron, ANALOG IN, MKS937A, PG105, MG13/14, PKR251/360/361, PCR280, ATMION |
| Communication interface | RS232/485, Ethernet |
| Communication protocol | MODBUS-TCP |
| User interface | 7" TFT display with touchscreen, digital encoder |
| Interface languages | English, German, Polish |
| Dimensions | 483 x 133 x 435 mm (W x H x D), 19" rack mountable |
| Weight (approx.) | 9.2 kg |
6.Flood Source Power Supply FS40-PS
The FS40-PS power supply allows fine adjustment of all instrument parameters for achieving a wide range of beam profiles.
All adjustable parameters are displayed on the large TFT display with touchscreen. All settings can be manually adjusted or can be stored and recalled automatically after unit switch on. The unit also features a built in timer and automatic standby mode. The FS40-PS can be supplied as a full width 19″ rack mounting unit (3U height) or free standing. Unit can be remotely controlled via one of available interfaces. Unit also provides remote control of beam energy, emission current, focus and extractor voltages using analog interface. Autosave function for saving your parameters/unit preset and applying them automatically after restart.
Application
The FS40-PS power supply is designed for use with the FS40A1 Electron Flood Sources which are used for charge neutralization of insulator and semiconductor samples in XPS/AES and SIMS applications.
Options
- Software control (Version Pro, Extended or Library Module).
Technical data
| Supply voltage | 100 V - 240 V, 50/60 Hz (power consumption max 75 W) |
| Beam energy (low energy range) |
0.01 - 50 eV, resolution 0.01 eV |
| Beam energy (high energy range) |
50 - 1000 eV, resolution 0.1 eV |
| Emission current | 1 - 1000 μA, resolution 0.1 μA |
| Focus voltage | 300 - 1000 V, resolution 0.1 V |
| Extractor voltage | 0 - 150 V, resolution 0.1 V |
| Analog inputs | 4 (0-10V) |
| Timer | dual mode timer 0s - 99h 59m |
| Communication interface | RS232/485, Ethernet |
| Communication protocol | MODBUS-TCP |
| User Interface | 7” TFT display with touchscreen, digital encoder |
| Interface languages | English, German, Polish |
| Dimensions | 483 x 133 x 435 mm (W x H x D), 19" rack mountable or alone |
| Weight (approx.) | 5.2 kg |
7.UV Source Power Supply UV40A-PS
The UV40A-PS can work in either constant discharge current or discharge voltage mode to provide the best operation conditions for the UV source.
The source can be automatically ignited directly from the power supply or manually on the source via a piezo-electric igniter. All adjustable parameters are clearly displayed on the large front-panel TFT and precisely controlled via digital encoders. The unit also features a built in timer and automatic standby mode. The UV40A-PS is supplied as a full width 19″ rack mounting unit (3U height). Easy firmware update via USB port. Unit can be remotely controlled via RS232/485 or Ethernet interfaces. Autosave function for saving your parameters/unit preset and applying them automatically after restart.
Application
The UV40A-PS power supply controls the UV40A1 UV Source in ultraviolet photoelectron spectroscopy (UPS) applications
Options
- Software control (Version Pro, Extended or Library Module)
- Analog I/O card for vacuum measurement (1 gauge)
Technical data
| Supply Voltage | 100 - 120 VAC/200 - 240 VAC, 50/60 Hz (power consumption max 800 W) |
| Output Power | 300 W |
| Discharge voltage (Usource) | 200 - 1000 V, resolution 10V, ripple < 0.5 Vpp |
| Discharge current (Iemis) | 5 - 300 mA, resolution 1 mA |
| Vacuum measurement (optional) | CTR90, TTR91, TTR211, PTR225, PTR90, ITR90, ITR100, Baratron, ANALOG IN, MKS937A, PG105, MG13/14, PKR251/360/361, PCR280, ATMION |
| Communication interface | RS232/485, Ethernet |
| Communication protocol | MODBUS-TCP |
| User Interface | 7” TFT display with touchscreen, digital encoder |
| Interface languages | English, German, Polish |
| Dimensions | 448.8 x 132.5 x 435 mm (W x H x D), 19" rack mountable |
| Weight (approx.) | 9.3 kg |
8.X-ray High Voltage Power Supply XRHV01-PS
High voltage power supply is dedicated for X-ray source RS 40B1.
The XRHV01-PS unit provides a 0 to 15 kV output voltage and 800 W max. output power. The power supply is controlled via analogue I/O by XR40B-EC. The high voltage can be set via 0 - 5 V analog input, corresponding to a monitored 0 - 15 kV output voltage. The current limit can be set via 0 - 5 V analog input corresponding to a monitored output current of 0 - 50 mA. The output is fully protected in case of either short or overload current.
Additional information
Full functionality only in connection with the Emission Controller XR40B-EC.
Technical data
| Supply voltage | 85 - 260 VAC, 50/60 Hz |
| Output voltage range (VO) | 0 - 15 kV |
| Output current range (IO) | 0 - 50 mA |
| Max output power | 800W |
| Voltage regulation | <0.005% |
| Polarity | positive |
| Remote control | via indirect coupled analogue I/O (male D-SUB 9) | set and monitor 0 - 5V |
| Protection | over load and short circuit, voltage supply and temperature |
| Dimensions | 483 x 45 x 420 mm (W x H x D), 19" rack mountable |
| Weight (approx.) | 6.5 kg |
9.Titanium Sublimation Pump Power Supply TSP03-PS
The TSP03-PS Titanium Sublimation Pump Power Supply is configured for constant filament current operation and features a thyristor and phase-control circuit for long-term and trouble-free TSP operation.
Unit can be remotely controlled via RS232/485 or Ethernet interfaces.
Application
The Titanium Sublimation Pump Controller regulates the quantity of material sublimated from the filaments, compensating for changing conditions and eliminating the need for operator attendance or adjustment. Four filaments can be connected simultaneously, but only one at the time can be operated. To avoid the fracture of the Ti filament due to the thermal stress or the structural change of Ti, ramp time and max. current for each filament can be set. All parameters of each filament can be set individually (max current, ramp time, filament number etc.). Autosave function for saving your parameters/unit preset and applying them automatically after restart.
Additional information
4 filament outputs with common ground connection. Low cost. Simple, robust and reliable design, easy to service. All output switching is by semiconductor devices. Low-noise: Complies with EC EMC and LV Directives. Sublimation current settable over the range 5 to 55 A in increments of 1 A. Vacuum interlock input. The TSP03-PS is a 19″ rack mounted unit (full-width, 3U height).
- Voltage measurement directly on filaments
- Independent and flexible filament configuration
- Full filament diagnostic
- Independent filament sequence operation
10.Electron Beam Evaporator Power Supply EBV40A-PS
Power supply designed for Electron Beam Evaporator EBV40A used for evaporation of materials either from a rod or from a crucible under clean UHV-conditions.
A key feature of the EBV40A is the integrated flux monitor. Evaporant flux is indirectly monitored via the measured ion current, providing accurate flux adjustment and faster deposition rate control. The ion collector is contained within the beam exit column. At a given electron emission current and beam energy the measured ion flux measured is directly proportional to the flux of evaporated atoms. The EBV40A-PS is equipped with built-in PID controller which stabilizes evaporant flux at the desired level. The unit can be operated in AUTO mode (with ion flux control) or MANUAL mode (without ion flux control). The EBV40A-PS can be supplied as a full width 19″ rack mounting unit (3U height) or free standing. Unit can be remotely controlled via one of available interfaces.
Application
The EBV40A-PS power supply drives the EBV40A Electron Beam Evaporator for ultra-pure sub-monolayer and multilayer growth in MBE applications.
Options
- Software control (Version Pro, Extended or Library Module).
Technical data
| Supply voltage | 110 V or 230 V, 50/60 Hz (specify at order) (power consumption max 600 W) |
| Anode voltage range (Ueng) | 0 - 1500 eV at max 200 mA; resolution < 1 V; ripple < 0.5PP |
| Cathode current range (Ifil) | 0 - 2.3 A, resolution < 0,1 A, ripple < 0.05 A |
| Ion current range (Flux) | 1.00 nA - 99.9 mA |
| Max emission currrent | 200 mA |
| Temperature monitor | 0 - 75 °C, temperature of water-cooled copper cylinder |
| Flux current regulator | flux current controlled with internal regulator |
| Operating modes | auto/manual |
| Timer | dual mode timer 0 s - 99 h 59 min |
| Communication interface* (option) | RS232/485/422, USB |
| User interface | large LCD graphics display, functions keys & digital encoder |
| Interface languages | English, Polish |
| Dimensions | 483 x 133 x 380 mm (W x H x D), 19" rack mountable or stand alone |
| Weight (approx.) | 9 kg |
* Only one comms interface can be used at any one time and is chosen at time of order. However, this may be swapped/interchanged with any other comms interface at any future date via simple rear panel plug and play swap, without having to access the internals of the unit.
NOTE
Other power supplies for electron beam evaporators with target temperature control can be supplied if required.
1.Thickness Monitors Controller TMC-13
TMC13 is the newest technology electronics designed for monitoring and controlling any coating and deposition processes.
Up to six channel inputs and two additional vacuum gauge channels together with 7" TFT display makes this unit really unique and universal. Sensor inputs can be assigned to different materials with individual parameters as well. High speed and high accuracy measuring process controlled by DSP processor improves the film quality and repeatability. It brings also the features of accuracy, stability and instrument configuration. Autosave function for saving your parameters/unit preset and applying them automatically after restart.
Features
- Up to 6 channels for thickness monitor sensors with quartz balances
- 2D real time chart module (option)
- two inputs for most active vacuum gauges
- up to 8 shutters and I/O reprogrammable
- relay outputs
- two reprogrammable analog outputs for rate and thickness monitoring with 16 bits resolution
- industry standard 6 MHz Crystal
- frequency resolution: 0.1 Hz (TM13) or 0.01 Hz (TM14)
- operation of up to two multi-crystal sensor heads (pneumatic or stepper motor)
- compact design
- Rapid SE and LabVIEW libraries
- one-touch material change
- favourites list for frequently used materials
- one-touch units change
- save individual user profile
- built-in video tutorials
Additional Information
Available software dedicated for precise rate measurements. Registers changes in the frequency of the quartz resonator in time (in the form of a graph). Allows the user to calculate the evaporation rate from the selected time interval. Suitable for e.g. MBE applications.
Technical data
| Supply voltage | 100-240 VAC, 50/60 Hz (power consumption max 100 W) |
| TM sensor inputs channels | 6 |
| Thickness | 0 - 9999000 Å |
| Rate | 0 - 9999 Å/s |
| Compatible sensors (two channels) |
CTR90, TTR91, TTR211, PTR225, PTR90, ITR90, ITR100, Baratron, ANALOG IN, MKS937A, PG105, MG13/14, PKR251/360/361, PCR280, ATMION |
| Frequency resolution | TM13: 0.1 Hz | TM14: 0.01 Hz |
| Frequency range | 2-6 MHz |
| Thickness resolution | TM13: 0.1 Å | TM14: 0.01 Å |
| Rate resolution | TM13: 0.1 Å/s | TM14: 0.01 Å/s |
| Frequency stability | TM13: 0.5 ppm | TM14: 0.5 ppm |
| Tooling factor | 1 - 400% |
| Measurement units | Å, kÅ, nm |
| Measurement period | 100 ms - 2 s (depend on TM type) |
| Shutter control | manual, time, thickness |
| Shutter time | 1 - 1000000 s |
| Pressure channels inputs | 2 |
| Measurement units | mbar, Pa, Torr, Psia |
| Degas time | 1 - 3 min |
| Output | ▪ 8 relay outputs (2 outputs with COM NC and NO contacts) ▪ 2 analog outputs: 0-10V (retransmision thickness, rate, pressure) |
| Inputs | 4 digital inputs (in 24V logic) |
| Communication interface | RS232/485, Ethernet |
| Communication protocol | MODBUS-TCP |
| User interface | 7″ TFT display with touchscreen |
| Interface languages | English, German, Polish |
| Dimensions | 212.6 x 128.4 x 260.9 mm (W x H x D) |
| Weight (approx.) | 3 kg |
2.Ion Multi Gauge Controller MG15
The MG15 is able to support four active gauges and up to three passive gauges, extending the measurement range to 2×10-12 mbar.
The unit is fully software controlled. The unit can be remotely controlled via one of available interfaces.
Features
• measurement range from atmospheric to 2x10-12 mbar
• pressure plots
• pressure trend graphs
• measurement filtering (low, med, hi)
• controls almost all commercially available Bayard-Alpert gauges
• degassing of Bayard-Alpert with power and time limit
• supports Ir/W/Thoria filaments
• bayard-Alpert overpressure protection
• selectable measurement units: mbar, Torr, Pascal, Psia
• gas specific correction with one customized setting
• unit over-temperature protection
• 10 individually programmable set-points with threshold and hysteresis functions
• user-defined channel names
• possibility of active gauges self-identification
• charts module - real time pressure charts with data export possiblity (option)
• pararell measurement for all channels
• flux monitor
• black box version available (option) - without 7" TFT display
• fully software controlled (option)
• autosave function for saving your parameters/unit preset and applying them automatically after restart.
• Labview compatible (option)
Applications
• Any high and ultra high vacuum systems
• Measurement of pressure (from atmosphere to UHV range)
• Bakeable and non bakeable systems
Technical data
| Supply voltage | 100 - 240 VAC, 50 - 60 Hz (power consumption max 200 W) |
| Measurement chanels | up to 7 (active channels: 4; passive channels: up to 3 - number defined at the time of order) |
| Supported active gauges | CTR90, TTR91, TTR211, PTR225, PKR251/360/361, PCR280, PTR90, ITR90, ITR100, Baratron, ANALOG IN, PG105, ATMION, User defined* |
| Supported passive gauges | IE414, IE514, UHV-24, UHV-24p, MKS Series 274, NUDE-UHV-8A, NR-F-UHV, G8130, BARION basic II, User defined* |
| Measurement range: Passive channel Active channel |
2x12-12 mbar 5x10-10 mbar |
| Display range | 2x10-12 - 2x105mbar |
| Setpoints relay outputs | 10 (4xNO/NC, 6xNO) |
| Relay outputs with configurable activation signal | 4 (Emission, Degas) |
| Digital inputs | 4 |
| Analog outputs | 4 (0-10V) |
| Communication interface | RS232/485, Ethernet, PROFINET (option - specify at order) |
| Communication protocol | MODBUS-TCP |
| User interface | 7" TFT display with touchscreen |
| Dimensions [mm] | 212.6 x 128.4 x 260.3 mm (WxHxD), 1/2 of 3HE 19" |
| Weight (approx.) | 3.8 kg |
* prepared to support many other custom gauges
1.Research Unit Digital Instrument RUDI-EA2
Novel, modular high voltage power supply for photoemission and other demanding research applications.
The electronics features fully calibrated, independently operating modules utilising the very latest electronics and software technology. Voltage supplies are controlled by high precision 16-bit digital-to-analog converters with high linearity and extremely high temperature stability. Automatic low and high voltage range settings, as well as output polarity, are under full user control.
The combined high specifiation and system flexibility makes RUDI-EA2 the obvious choice for many analysis applications, where stable, high voltage supplies are required and can also be readily configured by the end user.
Each RUDI-EA2 unit is supplied with a comprehensive serial communication protocol description which can be easily implemented for individual control needs, thus removing the reliance on specific, often prohibitive supplier software.
As the demand for smarter, connected technologies increases, PREVAC provides the best in class electronic solutions. The electronic mainboard of the RUDI-EA2 system is a showcase for the best in active digital and analog electronic components currently on the market.
Features:
▪ Special techniques have been used to achieve rapid temperature stabilization. The system is ready for use after only 3 minutes from switch on.
▪ Each independent voltage module achieves temperature stability below 0.5 ppm of the voltage span per degree Celcius.
▪ Using 16bit AD converters, the 6 kV power supplies can be set with a resolution of just 92 mV and with a maximum noise level of only 200 µVp-p.
▪ Each modules can be controlled independently via MODBUS-TCP 460 Kbit/s wire interface.
▪ Each module has a floating output which means a wide range of configurations are possible making the unit truly universal - serial configuration is unlimited.
▪ Any other voltages up to 6000 V available on request
▪ High linearity controlled with an accuracy of 16 bits
▪ Up to 28 modules fit into 9U rack
▪ Voltage deviation calculated with two-point calibration at min and max voltage
Technical data
| Power supply | 110-260 V 50/60 Hz, max. 200 VA, depends on modules number |
| Maximum number of modules in 9U rack | 28 of all modules chosen from DAC and HV |
| High voltage modules | Different version up to 6 kV, bipolar, floating output |
| DAC modules | High precision 16 bit +/-12.5 V |
| Insulation | All HV and DAC modules have full insulation 6 kV to power and ground |
| Temperature stability | < 0.5 ppm/°C for all modules |
| External interlock | active when the contact is closed |
| Communication interface | MODBUS-TCP 460 Kbit/s |
| Rack dimensions | 483 x 395 x 360 mm (W x H x D), rack 9U height, 84Hp width |
| Weight (approx.) | 18 kg (for ~20 modules) |
High voltage modules
| Modules | Output voltage | Maximum output current |
| HV 100V | ~0 – 100 V, 16 bit, step size ~1.6 mV | ~600 µA |
| HV 600V | ~0 – 600 V, 16 bit, step size ~9.2 mV | ~300 µA |
| HV 600/100V | Low range ~0 – 100 V, 16 bit, step size ~1.6 mV High range ~0 – 600 V, 16 bit, step size ~9.2 mV |
~300 µA |
| HV 1900/100V | Low range ~0 – 100 V, 16 bit, step size ~1.6 mV High range ~0 – 1900 V, 16 bit, step size ~23 mV |
~200 µA |
| HV 2200V | ~0 – 2200 V, 16 bit, step size ~34 mV | ~150 µA |
| HV 4000V | ~0 – 4000 V, 16 bit, step size ~61 mV | ~100 µA |
| HV 6000/600V | Low range ~0 – 600 V, 16 bit, step size ~9.2 mV High range ~0 – 6000 V, 16 bit, step size ~92 mV |
~100 µA |
DAC modules
| Output voltage | 0… +/- 12.5 V |
| Precision | 16 bit |
| Step size | 200 µV |
| Protection | Surge protection 23 kV |
2.Research Unit Digital Instrument RUDI-8M
Modular, compact high voltage power supply for photoemission and other demanding research applications.
The electronics features fully calibrated, independently operating modules utilising the very latest electronics and software technology. Voltage supplies are controlled by high precision 16-bit digital-to-analog converters with high linearity and very high temperature stability. Automatic low and high voltage range settings, as well as output polarity, are under full user control.
The combined high specifiation and system flexibility makes RUDI-8M the obvious choice for many analysis applications, where stable, high voltage supplies are required and can also be readily configured by the end user.
Device is supplied with a comprehensive serial communication protocol description, which can be easily implemented for individual control needs (thus removing the reliance on specific, often prohibitive supplier software).
Features:
▪ Special techniques have been used to achieve rapid temperature stabilization. The system is ready for use after only 3 minutes from switch on.
▪ Each independent voltage module achieves temperature stability below 0.5 ppm of the voltage span per degree Celcius.
▪ Using 16bit AD converters, the 6 kV power supplies can be set with a resolution < 100 mV.
▪ Each modules can be controlled independently via MODBUS-TCP 460 Kbit/s wire interface.
▪ Each module has a floating output which means a wide range of configurations are possible making the unit truly universal (serial configuration).
▪ Any other voltages up to 6 kV available on request
▪ High linearity controlled with an accuracy of 16 bits
▪ Up to 8 modules fit into 3U rack
▪ Voltage deviation calculated with ten-point calibration at min and max voltage
Technical data
| Power supply | 100-240 V 50/60 Hz, max. 150 VA, depends on modules number |
| Maximum number of modules in 3U rack | 8 (8HP wide) or 4 (12HP)+ 2 (8HP), chosen from DAC and HV |
| High voltage modules | Different version up to 6 kV, bipolar, floating output |
| DAC modules | High precision 16 bit +/-12.5 V |
| Insulation | All HV and DAC modules have full insulation 6 kV to power and ground |
| Temperature stability | < 0.5 ppm/°C for all modules |
| External interlock | active when the contact is closed |
| Communication interface | MODBUS-TCP 460 Kbit/s |
| Rack dimensions | 448.8 x 132.5 x 437 mm (W x H x D), rack 3U height, 84Hp width |
| Weight (approx.) | 6 kg |
High voltage modules
| Modules | Output voltage | Maximum output current |
| HV 100V | ~0 – 100 V, 16 bit, step size ~1.6 mV | ~600 µA |
| HV 600V | ~0 – 600 V, 16 bit, step size ~9.2 mV | ~300 µA |
| HV 600/100V | Low range ~0 – 100 V, 16 bit, step size ~1.6 mV High range ~0 – 600 V, 16 bit, step size ~9.2 mV |
~300 µA |
| HV 1900/100V | Low range ~0 – 100 V, 16 bit, step size ~1.6 mV High range ~0 – 1900 V, 16 bit, step size ~23 mV |
~200 µA |
| HV 2200V | ~0 – 2200 V, 16 bit, step size ~34 mV | ~150 µA |
| HV 4000V | ~0 – 4000 V, 16 bit, step size ~61 mV | ~100 µA |
| HV 6000/600V | Low range ~0 – 600 V, 16 bit, step size ~9.2 mV High range ~0 – 6000 V, 16 bit, step size ~92 mV |
~100 µA |
DAC modules
| Output voltage | 0… +/- 12.5 V |
| Precision | 16 bit |
| Step size | 200 µV |
| Protection | Surge protection 23 kV |
3.X-ray Source Electronics Set XR40B
The XR40B set comprises 3 units for full control of the X-ray Source RS40B1:
The XR40B-EC unit controls the emission current of the X-ray source and also the XRHV01-PS high voltage power supply, displaying both, the high voltage and emission current, on a single display. The XR40B-EC displayed emission current is the exact emission current (corrected by the water leakage current of the cooling system). This combination allows very convenient and stable control of the X-ray source. The unit stores information about total anode working time and dissipated power. Communication with cooling box is via fiber optic wire. The XR40B set has both operational and standby modes, guaranteeing the most accurate and stable emission at the start of an experiment. The XRCB02 cooling box delivers water cooling safely and efficiently to the anode and to the housing. It is fully interlocked, monitoring water temperature, pressure and flow, so that the instrument can only operate if fully safe to do so. The cooling box can handle up to two X-ray sources. Autosave function (XR40B-EC unit) for saving your parameters/unit preset and applying them automatically after restart.
Options
- X-ray monochromator quartz crystal heating
- Software control (Version Pro, Extended or Library Module)
Note
If any interlock condition is not met, the source cannot be powered on. In addition to these three interlocked safety mechanisms, water leakage current is continuously monitored.
Technical data
| Supply voltage XR40B-EC XRHV01-PS XRCB02 |
100 - 240 VAC, 50/60 Hz 85 - 260 VAC, 50/60 Hz 230 VAC (with water pump) 110 VAC (with water pump) 110-240VAC (without water pump) |
| Emission current range (Ie) | 0 - 50 mA, accuracy 0.1 mA |
| Anode high voltage range (UHV) | 0.5 kV - 15 kV, accuracy 0.1 kV |
| Cathode current (Icath) | output 1: 2.5 A output 2: up to 6 A in operate mode |
| Anode power limit | 750 W |
| Emission curent ramp | 0.1 - 50 mA/sec |
| High voltage ramp | 1 - 1000 V/sec |
| Interlocks XR40B-EC | master, 2 X-ray cover, high vacuum, cooling water, remote |
| Water cooling XRCB02 | max. 6 bar, 6 l/min. prepared for de-ionized water |
| Communication interface | RS232/485, Ethernet |
| Communication protocol | MODBUS-TCP |
| User interface XR40B-EC | 7" TFT display with touchscreen, digital encoder |
| Interface languages | English, German, Polish |
| Dimensions XR40B-EC | 483 x 133 x 380 mm (W x H x D), 19" rack mountable |
| Weight (approx.) XR40B-EC | 7 kg |
| Dimensions XRHV01-PS | 483 x 45 x 420 mm (W x H x D), 19" rack mountable |
| Weight (approx.) XRHV01-PS | 6.5 kg |
| Dimensions XRCB02 | 483 x 133 x 295 mm (W x H x D), 19' rack mountable |
| Weight (approx.) XRCB-02 | 18 kg |
4.X-ray Source Emission Controller XR40B-EC
The XR40B-EC electronic unit controls the X-ray source emission current.
It fully controls the high voltage X-ray source power supply XRHV01-PS via analogue interface 0 - 5V, so the user can see the high voltage and emission current on the XR40B-EC display. The XR40B-EC displayed emission current is the exact emission current (corrected by the water leakage current of the cooling system). This combination allows very convenient and stable control of the X-ray source. The XR40B-EC controller has several interlocks: master interlock, two X-ray tube cover interlocks, high vacuum interlock, cooling water interlock and remote interlock to fully protect both the user and X-ray source. If any interlock condition is not meet the source is disabled. Two operating modes, Standby and Operate, guarantee the most accurate and stable emission immediately after starting an experiment. Easy firmware update via USB port. Unit can be remotely controlled via RS232/485 or Ethernet interfaces. Autosave function (XR40B-EC unit) for saving your parameters/unit preset and applying them automatically after restart.
Capability to operate up to two X-ray sources.
Options:
- X-ray monochromator quartz crystal heating
- Software control (Version Pro, Extended or Library Module)
Note
If any interlock condition is not met, the source cannot be powered on. In addition to these three interlocked safety mechanisms, water leakage current is continuously monitored.
Technical data
| Supply voltage | 100 - 240 VAC, 50/60 Hz (power consumption max 1600W) |
| Emission current range (Ie) | 0 - 50 mA, accuracy 0.1 mA |
| Anode high voltage range (UHV) | 0.5 kV - 15 kV, accuracy 0.1 kV |
| Cathode current (Icath) | output 1: 2.5 A output 2: up to 6 A in operate mode |
| Anode power limit | 750 W |
| Emission curent ramp | 0.1 - 50 mA/sec |
| High voltage ramp | 1 - 1000 V/sec |
| Interlocks | master, 2 X-ray cover, high vacuum, cooling water, remote |
| Communication interface | RS232/485, Ethernet |
| Communication protocol | MODBUS-TCP |
| User interface | 7" TFT display with touchscreen, digital encoder |
| Interface languages | English, German, Polish |
| Dimensions | 483 x 133 x 380 mm (W x H x D), 19" rack mountable |
| Weight (approx.) | 7 kg |
5.X-ray Cooling Controller XRCB-02
The XRCB-02 Cooling Controller is mainly used to cooling control of the X-ray sources.
Water cools the X-ray source’s anode, which operates at high potential. All water cooling pipework is electrically isolated. The XRCB-02 cooling controller requires a water feed from a re-circulating chiller for correct operation. Water flow, temperature and pressure are continually monitored.
Additional information
Full functionality only with connection to the Emission Controller XR40B-EC.
Features
- cooling controller can handle up to two X-ray sources
- over pressure safety valve
- anti condensing internal pipework
- high voltage resistance pipework for cooling water
- adjustable flowmeter and over pressure valve
- communication with cooling box is via fiber optic wire
Technical data
| Supply voltage |
230 VAC (with water pump) 110 VAC (with water pump) 110-240VAC (without water pump) |
| Water cooling | max. 6 bar, 5 l/min. prepared for de-ionized water |
| Dimensions | 483 x 133 x 295 mm (W x H x D), 19' rack mountable |
| Weight (approx.) | 18 kg |
6.X-ray Source Electronics Set XREC20
XREC20 electronic set dedicated for full control of the SAX X-ray sources.
The XREC20 set comprises 2 units for full control of the SAX X-ray Sources: XREC20-I emission controller and XRHV02-PS high voltage power supply.
The XREC20-I unit controls the emission current of the X-ray source and also the XRHV02-PS high voltage power supply, displaying both the high voltage and emission current on a single display. Unit allows measurement of working time and anode power. The X-ray source electronics set has both operational and standby modes, guaranteeing the most accurate and stable emission at the start of an experiment. Easy firmware update via USB port (XREC20-I). Unit can be remotely controlled via RS232/485 or Ethernet interfaces. Autosave function (XREC20-I unit) for saving your parameters/unit preset and applying them automatically after restart.
Technical data
XREC20-I
| Supply voltage | 110 or 230 VAC, 50/60 Hz, (power consumption max 1800 W) |
| Emission current range (Ie) | 0 - 100 mA, accuracy 0.1 mA |
| Anode high voltage range (UHV) | 0.5 kV - 15 kV, accuracy 0.1 kV |
| Cathode current (Icath) | 3A in Standby mode up to 20A in Operate mode |
| Anode power limit | 650 W |
| High voltage ramp | 1 - 1000 V/sec |
| Emission curent ramp | 0.1 - 50 mA/sec |
| Interlocks | High vacuum Cooling water (master) X-ray cover |
| Communication Interface | RS232/485, Ethernet |
| Communication protocol | MODBUS-TCP |
| XREC20-I user interface | 7" TFT display with touchscreen, digital encoder |
| Interface languages | English, German, Polish |
| Dimensions XREC20-I | 483 x 133 x 380 mm (W x H x D), 19" rack mountable |
| Dimensions XRHV02-PS [mm] | 483 x 88 x 420 (W x H x D), 19" rack mountable |
| Weight (approx.) | 10 kg |
XRHV02-PS
| Supply voltage | 85 - 260 VAC, 50-60 Hz, |
| Output voltage range Vo | 0 - 15 kV |
| Output current range Io | 0 - 100 mA |
| Max output power | 1.5 kW |
| Polarity | negative |
| Remote control | via indirect coupled analogue I/O (male D-SUB 9) set and monitor 0 - 5 V |
| Protection | over load and short circuit, voltage supply and temperature |
| Dimensions | 483 × 88 × 420 mm (W×H×D), 19″ rack mountable |
| Weight (approx.) | 6.5 kg |
XREC20 electronic set dedicated for full control of the SAX X-ray sources.
The XREC20 set comprises 2 units for full control of the SAX X-ray Sources: XREC20-I emission controller and XRHV02-PS high voltage power supply.
The XREC20-I unit controls the emission current of the X-ray source and also the XRHV02-PS high voltage power supply, displaying both the high voltage and emission current on a single display. Unit allows measurement of working time and anode power. The X-ray source electronics set has both operational and standby modes, guaranteeing the most accurate and stable emission at the start of an experiment. Easy firmware update via USB port (XREC20-I). Unit can be remotely controlled via RS232/485 or Ethernet interfaces. Autosave function (XREC20-I unit) for saving your parameters/unit preset and applying them automatically after restart.
7.Bakeout Control Unit BCU14
The BCU14 Bakeout Control Unit is a microprocessor controlled device for independent control of either two heating zones of a vacuum system or a single heating zone and a sample heater inside e.g. a preparation chamber.
Heating operation for either one sample and one chamber or for two chambers is factory pre-set and cannot be modified by the user. An additional option allows the customer to independently control other non-regulated heaters such as those used for ion pumps. Unit can be remotely controlled via RS232/485 or Ethernet interfaces. Autosave function for saving your parameters/unit preset and applying them automatically after restart.
Application
The main tasks of the BCU14 are regulation and stabilization of (i) the power supplied to the heaters in order to achieve a required bakeout temperature in any given zone, and (ii) parallel control of unregulated heaters (on valves, ion pumps, etc.). Target temperature, bake time and ramp times are all user-defined.
Additional information
The BCU14 Bakeout Control Unit controller can be supplied in a 3HE 19″ enclosure unit with steering power components (one or two units - 2 heat zones per unit) or for 19″ rack mounting with external power components.
Features
- Instruction by video movie integrated on TFT display
- Configurable user interface
- Power failure procedures
- Configurable interlocks
- Independent fans control system
- Sensor break protection
- Additional output signals to control external units
- Easy firmware upgrade via USB
Technical data
| Supply voltage | 230 VAC (L+N+PE, 2L+PE) (power consumption max 11.5 kW) 3x400 V(3L+N+PE) (power consumption max 19.55 kW) |
| Temperature range control | room temperature up to 1200°C |
| Regulation method | fully automated based on PID algorithm |
| Measurement resolution | ± 1°C |
| Interlocks | fully isolated, one for each zone + common |
| Number of control zones | 2 independent |
| Timers | 2 independent for each zone |
| Operation modes | timer, manual (timer counter) |
| Process parameters | time, temperature, RAMP |
| Communication interface | RS232/485, Ethernet |
| User interface | 7” TFT display with touchscreen |
| Interface languages | English, German, Polish |
| Dimensions | 448.8 x 132.5 x 435 mm (W x H x D), 19" rack mountable |
| Weight (approx.) | 10 kg |
8.Vacuum Chamber Highlight VCH-10
The VCH-10 is the perfect accessory for illuminating sample areas, movement regions and source or accessory positions within a HV and UHV systems.
It combines a very high brightness, long lifetime at very low power LED illumination source with a compact power supply that can be operated from a handheld remote controller or directly from a PC. The controller as standard can power up to 10 LEDs, either single or double types. Each source is connected via a generous USB standard cable. Just one or up to 10 channels can be connected and used at once. Individual LEDs may also be powered from a standard computer USB port.
- Low power: just 40 W with all 10 channels in use
- High intensity: 185 lumens
- Long lifetime: >100,000 hours per LED
- Longer lifetime, same brightness
- Single LED powered from standard USB port
- Dedicated for DN 40 CF (single type) or DN 63 CF - 200 CF (double type) flanges
- Each LED with 5m cable
9.Vacuum Chamber Highlight VCH-10
The Power Control Unit PCU16 is a compact, standalone microprocessor device for controlling UHV vacuum system.
It supports one ultra-high vacuum pump (e.g. turbo molecular pump, ion pump, cryo pump, etc.), electromagnetic vent valve, electromagnetic safety valve, fore vacuum pump and two vacuum gauges based on the 0 - 10V output standard. The PCU16 displays the state of all of the connected peripheral devices on a large 7″ TFT LCD touchscreen, providing clear readouts of important system parameters to the user. The unit comprises several interlocks to protect the vacuum system in the event of power loss or in the case that a pump or other device might fail. Five different and most popular configurations are implemented on the delivered unit. Customers can choose one of these fixed configurations and set it as the default display. Easy firmware upgrade via USB. Unit can be remotely controlled via RS232/485 or Ethernet interfaces. Autosave function for saving your parameters/unit preset and applying them automatically after restart.
Applications
- Control of any high and ultra high vacuum system
- Measurement of pressure
- Bakeable and non-bakeable systems
- Control and automation of pump down cycle
- Control and automation of venting cycle
The PCU16 has an externally attached UPS ensuring full control and protection of the vacuum system even on power failure. It is available with full dedicated software application or library module.
Additional information
The PCU16 front control panel is divided into two parts:
• left - graphical presentation of vacuum system
• right - panel which indicates the current state of the vacuum system (set-points, power, failures etc.)
Technical data
| Supply voltage | 100 - 240 VAC, 50/60 Hz (power consumption max 250 W) |
| Measurement channels | 2 |
| Display range | 2 x 10-12 - 2.1 x 105 mbar |
| Compatible sensors Channel 1 Channel 2 |
CTR90, TTR91, TTR211, PKR251, PCR280, ANALOG IN, PG105 CTR90, TTR91, TTR211, PTR225, PTR90, ITR90, ITR100, Baratron, ANALOG IN, MKS937A, PG105, MG13/14, PKR251/360/361, PCR280, ATMION |
| Supported valves | any 24V / max 2A |
| Supported fore vacuum pump | any 1 phase 230 VAC, 5 A max or 1 - 3 phase with external interface |
| Supported TMP | RS232/485 connected via TURBO.DRIVE S any with the standard ON/OFF control |
| Communication interface | RS232/485, Ethernet |
| Communication protocol | MODBUS-TCP |
| User interface | 7” TFT display with touchscreen |
| Interface languages | English, German, Polish |
| Dimensions | 212.6 x 128.4 x 260.3 (WxHxD), ½ of 3HE 19" |
| Weight (approx.) | 3.6 kg |
10.Stepper Motor Control Device SMCD14
The SMCD14 Stepper Motor Control Device is designed for controlling the low and high power stepper motors in applications.
The SMCD14 device is mainly recommended for precision transfer systems, e.g. manipulators, sample transfer systems etc.
Technical data
| Supply voltage | 230 VAC, 50-60 Hz (power consumption max 70 W) |
| Compatible stepper motors |
▪ 2 phase bipolar, motor current up to 3A/phase ▪ Motor power supply 24V ▪ Default microstepping mode: 1/16 step (3200 steps per motor rotation) Other modes available |
| Encoder options | Quadrature incremental encoder with or without differential RS422 line driver. Default for on-shaft rotary encoder 500CPR (2000 imp/rev) |
| External inputs | ▪ 2 limit switches inputs for over-travel protection ▪ Reference position signal, for accurate position detection ▪ Enabling signal for interlocking motor movement |
| Indicators | Led indicators informing of current movement events and errors |
| Communication Interface | Modbus RTU protocol over dedicated RJ45 connector allow to connect multiple devices in a chain system |
| Dimensions | 106 × 128 × 240 mm (W×H×D), 1/4 width, 3 units height, mounted in the 19″ rack |
| Weight (approx.) | 1.4 kg |
11.Motion Control 6
Motion Control 6 is a device for controlling up to 6 stepper motors.
It can be programmed to fit different specific requirements. Widely used Modbus-TCP communication protocol makes it easy to integrate with existing control systems - eg. PLC controllers, PC software, LabView applications. It can be shipped with standalone interface application or Tango Device Server. The device indicators inform about the transfer status for each axis, e.g. about reached limits or transferring failures.
Applications
The MC6 device is mainly recommended for precision transfer systems, e.g. manipulators, sample transfer systems etc.
Technical data
| Supply voltage | 230 VAC, 50/60 Hz (rated power 300 W) |
| Compatible stepper motors | 2 phase bipolar, motor current 1.2 up to 3.8 A/phase. Motor power supply 24V. Default microstepping mode: 1/16 step (3200 steps per motor rotation). Other modes available. |
| Encoder options | Standard quadrature incremental encoder with differential line driver. Default for on-shaft rotary encoder 500CPR. Other options available - eg. load-side encoder |
| External input signals | 2 limit switches inputs for over-travel protection. Reference position signal, for accurate position detection. Enabling signal for interlocking motor movement |
| Control functions | Programmable target velocity, acceleration, backlash compensation, homing procedure configuration. Other customizable control functions on request |
| Communication interfaces | MODBUS-TCP (for control), RS485 (for programming/configuration) |
| Dimensions | 483 x 133 × 386 mm (W×H×D), 19″ rack mountable (full-width, 3U height) |
| Weight (approx.) | 10 kg |
12.Thickness Monitors TM13 & TM14
The TM13 and TM14 devices comprise: quartz oscillator, frequency measuring system and communication interface.
It is connected to the input element of a quartz resonator. The measurement results are transmitted via RS232 to the master device: either a PC or TMC13 controller. Remote control via TMC13 controller or PC.
Features TM13
- Frequency Resolution: 0.1 Hz
- Number of measurements per second: 4 (fixed)
- Maximum frequency of quartz oscillator: 6 MHz
- Stability: 0.5 ppm
Features TM14
- Frequency Resolution: 0.01 Hz
- Number of measurements per second: 0.5, 1, 2, 4, 10 (selectable)
- Maximum frequency of quartz oscillator: 6 MHz
- Stability: 0.5 ppm
Options
- Communication interface RS485 (specify at order)
Additional Information
Available software dedicated for precise rate measurements. Registers changes in the frequency of the quartz resonator in time (in the form of a graph). Allows the user to calculate the evaporation rate from the selected time interval. Suitable for e.g. MBE applications.
Technical data
| Power supply | 5V DC | |
| Current consumption | max 500 mA | |
| TM13 | TM14 | |
| Thickness resolution | 0.1 Å | 0.01 Å |
| Rate resolution | 0.1 Å/s | 0.01 Å/s |
| Frequency resolution | 0.1 Hz | 0.01 Hz |
| Frequency stability | 0.5 ppm | 0.5 ppm |
| Number of measurements per second | 4 | 0.5; 1; 2; 4; 10 (selectable) |
| Communication Interface | RS232 | |
| Dimensions [mm] | 80.0 x 50.0 x 27.0 mm (W x H x D) | |
| Weight (approx.) | 0.1 kg | |
